PR24L/40L plasma cleaning machine
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| Number | Content | Specification Parameters |
|---|---|---|
| 1 | Machine specifications | PR24L :650(W)×1240(H)×580(D)mm PR40L: 750(W)×550(H)×650(D)mm |
| 2 | Vacuum Chamber Specifications | PR24L : imported aluminum 600(W)×600(H)×600(D)mm PR40L:進(jìn)口鋁 350(W)×300(H)×400(D)mm |
| 3 | Electrode Specifications | PR24L，6-layer flat electrode plate（ 240(W)×270(D)mm） PR40L，8平板式電極板（330(W)×315(D)mm） |
| 4 | Control System | Touch screen + PLC control |
| 5 | Vacuum measurement system | Pirani resistance vacuum gauge |
| 6 | Gas Metering System | Accurate mass flow controller MFC |
| 7 | Number of gas channels | 2-5 working gases are optional: Ar2, N2, H2, CF4, O2 |
| 8 | Plasma generator | 0-1KW plasma generation source (40KHz, optional 13.56MHz) |
| 9 | Working gas | 2 working gases are optional: Ar2, N2, H2, O2 |
| Features: High precision, fast response, good handling and compatibility, perfect functions and professional technical support. Uses: Suitable for camera and industry, mobile phone manufacturing, semiconductor IC field, silicone, plastic, polymer field, automotive electronics industry, aviation industry, etc. 1. Printed circuit board industry: surface activation of high-frequency boards, surface cleaning and desmearing of multi-layer boards, surface cleaning and desmearing of soft boards and soft-rigid boards, activation of soft boards before reinforcement. 2. Semiconductor IC field: COB, COG, COF, ACF process, used for wire bonding and cleaning before welding; 3. Silica gel, plastic, polymer field: surface roughening, etching, and activation of silica gel, plastic, and polymer . |
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